| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow sensor which can suppress disturbance of the flow of a fluid flowing on the top surface of a substrate, and to provide its manufacturing method. SOLUTION: A lower film 2, a wire 4, and an upper film 3 are formed on the top surface of the substrate 1, and an insulating film 5 is formed on the reverse surface of the substrate 1. When a cavity part 6 is formed, a V-sectioned groove is formed where a belt-like area, extending in the flow direction of the fluid including detection parts 4a to 4c which pass through the border part of the constituting body of a sensor chip 10 on the top surface of the substrate 1. Then the border part of the constituting body and the inside of the groove are cut, to form a sensor chip 10 having its end part removed on the top surface side of the substrate 1. The sensor chip 10 is put in a chamber 21 of a chip pedestal 20, having a projection part 22 conforming with an oblique surface 1c, formed by removal of the end part.</p> |
