| 摘要 |
PROBLEM TO BE SOLVED: To reduce volumes of an inlet chamber 5 and an outlet chamber 6, by shortening an interval (d) of a width direction between conveying rollers 14a and 14b, while preventing interference of the rollers 14a, 14b of a vertically moving work W of a circular dome state before processing to form a film, when the work W is raised, passed between a circular opening 9 of a bottom wall at an inlet chamber 5 and the rollers 14a, 14b, conveyed, and then transferred to a carrier 12; the carrier 12 is transferred to a vapor-depositing chamber 1 via the rollers 14a, 14b to form the film on the work W; the carrier 12 is then transferred from the chamber 1 to an outlet chamber 6 via the rollers 14a, 14b; the work W formed with the film is dropped from the carrier 12, then lowered, passed between the rollers 14a and 14b and a circular opening 10 of a bottom wall of the chamber 6 and delivered from the chamber 6. SOLUTION: The positions of the conveying rollers 14a and 14b are offset to both sides of a longitudinal direction of the work conveying direction from width direction maximal positions P of the openings 9 and 10, to shorten the interval (d) in the roller width direction. |
