| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method of deciding systematic errors of a surface form measuring system, by which the calculated surface form of an object to be inspected can be found with high accuracy, without relying upon the shift of the object to be inspected, and to obtain a surface form measuring apparatus. SOLUTION: The surface form measuring apparatus is provided with an area sensor which measures the height of the surface of the object to be inspected in a two-dimensional region. The user of the instrument autonomously calibrates the instrument by itself, without relying upon technical experts in such a way that the user fixes a normal surface to be inspected on a two-dimensional positioning stage which can move in a direction perpendicular to the vertical direction and identifies the systematic error of the surface form measuring system caused by several shifts and pitching, rolling, and vertical shift errors caused by the shifts, by using the measured value of the surface form of the object, including the systematic error of the surface form measuring system. In addition, the user himself performs an autonomous correction of the measuring apparatus by subtracting systematic error from the calculated form, including the systematic error obtained from the measured value of the object by eliminating the influences of the errors and using a series of algorithms which determine the systematic error of the surface form measuring system at every detecting position in an area on the surface of the object.
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