| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning controller which is capable of lowering the relative position errors in position follow-up by effectively utilizing the periodicity that position fluctuations possess with respect to these position fluctuations and a positioning control method. SOLUTION: This positioning controller has a position detector for detecting the relative position error between a target positioning position of a target member and a moving member, an adder for adding the position error signal outputted by the position detector and a delay signal, signal delaying means for receiving the output of the adder and outputting the delay signal delayed by the period of the position fluctuation of the target member, driving means for moving the moving member and means for inputting the signal added with the position error signal and the delay signal to the driving means and adding and inputting the delay signal to the driving means through a filter having the predetermined frequency characteristics in a specific frequency range.
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