| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator which has a large movable range and can control displacement on the basis of an applied voltage. SOLUTION: The electrostatic actuator has a movable beam 102 and a beam supporting part to support the movable beam 102 in a cantilever manner. The movable beam 102 has a plurality of serially connected unit driver elements 110. Each unit driver element 110 has a first electrode supporting part 112, a second electrode supporting part 114, and a spring part 116 which connects them. The plurality of unit driver elements 110 are alternately located in a reverse direction along a direction where the movable beam 102 is extended. The first electrode supporting part 112 includes two earth electrodes 122a and 122b, and the second electrode supporting part 114 includes two drive electrodes 124a and 124b. That is, one unit driver element 110 has a first and second pairs of earth electrodes and drive electrodes.
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