| 摘要 |
PROBLEM TO BE SOLVED: To provide a height-measuring instrument that can accurately find the height of an object to be measured at a high speed with a simple constitution. SOLUTION: In this height-measuring instrument, a computer 14 is provided with an image acquiring means which acquires images composed of a plurality of pixels as confocal images at different focal positions, by relatively changing the focal position of the objective lens of a confocal optical system in the optical-axis direction with respect to the object to be measured, a vignetting means which vignettes a series of confocal images obtained at the focal positions so that a plurality of peaks, indicating the focal positions of different locations in a two-dimensional direction may be obtained on a characteristic curve, showing the relations between the intensities at noticeable pixels and the focal positions, and a height-calculating means which calculates the height distribution of the object, based on the characteristic curve having a plurality of peaks.
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