| 摘要 |
The invention relates to a collector for lighting systems having a wavelength </= 193 nm, preferably </= 126 nm, more preferably EUV wavelengths for receiving light from a light source via an aperture on the side of the object, and for illuminating a region on an image plane, comprising a plurality of rotationally symmetrical mirror shells respectively comprising at least one first mirror segment having one first optical surface,said mirror shells being arranged about a common axis of rotation and an annular aperture element of the aperture on the side of the object being associated with each mirror shell; a beginning and end point on a meridional plane are associated with the first optical surface, the meridional plane is a plane which includes the axis of rotation and the beginning point of the first optical surface on the meridional plane defines an outer edge beam and the endpoint of the first optical surface defines an inner edge beam, the inner and outer edge beams when rotated about the axis of rotation defining a brush discharge which is reflected on at least the first optical surface of the mirror shells and which runs through the collector from the aperture on the side of the object to the plane to be illuminated. The brush discharge defines a used area between at least two adjacent mirror shells. The invention is characterized in that the surface parameters and the position of the mirror shells are selected in such a way that at least one unused area is formed between at least two adjacent mirror shells. |
| 申请人 |
ZEISS, CARL;CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS;SINGER, WOLFGANG;EGLE, WILHELM;WEISS, MARKUS;HAINZ, JOACHIM;WIETZORREK, JOCHEN;MELZER, FRANK;WANGLER, JOHANNES |
发明人 |
SINGER, WOLFGANG;EGLE, WILHELM;WEISS, MARKUS;HAINZ, JOACHIM;WIETZORREK, JOCHEN;MELZER, FRANK;WANGLER, JOHANNES |
