RADIO FREQUENCY ELECTRODE ARRANGEMENTS FOR USE IN SPUTTERING APPARATUS,申请号GB19680057076-传众专利搜索

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发明名称	RADIO FREQUENCY ELECTRODE ARRANGEMENTS FOR USE IN SPUTTERING APPARATUS
摘要
申请公布号	GB1284223(A)	申请公布日期	1972.08.02
申请号	GB19680057076	申请日期	1968.12.02
申请人	EDWARDS HIGH VACUUM INTERNATIONAL LIMITED	发明人	RONALD MARSH;COLIN RICHARD DOUGLAS PRIESTLAND
分类号	C23C14/34;H01J37/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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