摘要 |
A hydraulic drive system that does not cause a decrease in efficiency of actuators, does not hinder an optimal action of devices such as flow adjustment valves, and does not cause any corrosion of water acting as an operating fluid. The system uses water as an operating fluid. The system includes a hydraulic generation apparatus (40) including, a main tank (41), a return path (52), an accessory tank (54), and a water disposal apparatus (56) disposed in a path (57). The operating fluid from structuring devices of the processing apparatuses (10, 20) and (30) flows through the return path (52). The operating fluid flows from the accessory tank (54) to the main tank (41) through the path (57) and the water disposal apparatus (56).
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申请人 |
EBARA CORPORATION;SHINODA, MASAO;MIYAKAWA, SHIMPEI;YAMASHINA, CHISHIRO;TAKAHASHI, TAMAMI;MOCHIZUKI, YOSHIHIRO;MAMMOTO, SHINZO;KUMAZAWA, SHIRO;KODAMA, RYUJI |
发明人 |
SHINODA, MASAO;MIYAKAWA, SHIMPEI;YAMASHINA, CHISHIRO;TAKAHASHI, TAMAMI;MOCHIZUKI, YOSHIHIRO;MAMMOTO, SHINZO;KUMAZAWA, SHIRO;KODAMA, RYUJI |