| 摘要 |
PURPOSE: A door opening and closing apparatus of a continuous polymer film polymerizing system using plasma is provided in which workers easily open doors for repairing when there is the trouble inside a process chamber, and safety accidents are prevented by securely maintaining opening and closing states of the doors. CONSTITUTION: In a continuous polymer film polymerizing system using plasma in which a polymer film is deposited on the surface of a material to be processed by plasma in the state that a sheet type material is continuously supplied into a process chamber(2), the door opening and closing apparatus of the continuous polymer film polymerizing system using plasma comprises upper and lower doors(13,13') which are installed at upper and lower sides of the process chamber(2) so that they are closed or opened; and an interlocking means(14) which is installed so that the lower door(13') interlocked with the upper door(13) is opened altogether when the upper door(13) is opened, wherein the interlocking means(14) is consisted of at least one or more gears so as to organically connect the upper door(13) to the lower door(13'), the interlocking means(14) comprises an upper gear(21) fixed to one side of the rear part of the upper door, and a lower gear(22) which is in gear with the upper gear(21) and fixed to one side of the rear part of the lower door(13') at the same time, and even number of idle gears are connected between the upper and lower doors(13,13').
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