发明名称 |
Method of producing shaped bodies of semiconductor materials |
摘要 |
A method for producing formed semiconductor articles with predefined shapes such as core tubes for CVD production of bulk polysilicon. The method is characterized by thermal spray deposition of the semiconductor material in a on a temperature controlled rotating mandrel that is shaped complementarily to the desired article shape, and by later separation of the formed semiconductor body from the mandrel by thermal contraction, melting, or chemical reduction of the mandrel size.
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申请公布号 |
US2002115273(A1) |
申请公布日期 |
2002.08.22 |
申请号 |
US20010933342 |
申请日期 |
2001.08.20 |
申请人 |
CHANDRA MOHAN;WAN YUEPENG |
发明人 |
CHANDRA MOHAN;WAN YUEPENG |
分类号 |
B22D23/00;C23C4/18;(IPC1-7):C30B1/00;H01L21/20;H01L21/36 |
主分类号 |
B22D23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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