DEVICE FOR PREVENTING LEAKAGE OF GAS OF CRYOGENIC REFRIGERATOR

摘要

PURPOSE: A device for preventing leakage of gas of cryogenic refrigerator is provided to securely join a compression part and a freezing part. CONSTITUTION: A precooler(200) cooling working gas at appropriate temperature and flowing into a pulse tube is joined to a cylinder(1a) where a piston linearly reciprocating by a linear motor is inserted to slide and reciprocates together with a mover of the linear motor to compress and pump the working gas. A joining protrusion(110) is formed on one of a front end surface of the cylinder and a corresponding surface of the precooler to be embossed and a joining groove(210) is formed on the other surface to be engraved as the joining protrusion is inserted and joined to.