发明名称 OPTICAL TRAIN ALIGNMENT PROCESS UTILIZING METROLOGY AND PLASTIC DEFORMATION
摘要 <p>A micro-optical train manufacturing process includes a step of characterizing the position of optical components (114) on an optical bench (130), typically using a metrology system. These optical components (114) are then aligned with respect to each other in a passive alignment step (250) based on data from the metrology system and optical system design information. As a result, a subsequent active align process (260) can be avoided in some situations, or if a subsequent active alignment process (260) is performed, the time required for that active alignment process (260) can be reduced because of this initial metrology-based passive alignment step (250).</p>
申请公布号 WO2002065178(A2) 申请公布日期 2002.08.22
申请号 US2002001184 申请日期 2002.01.14
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