发明名称 Pressure vessel systems and methods for dispensing liquid chemical compositions
摘要 Apparatus and processes are presented to contact a dry, preferably high purity inert gas with a chemical composition in a pressure vessel, or a wetting composition, to form a wet inert gas, which is then used to pressurize the chemical composition out of the pressure vessel. No additional space is needed for an external humidifier. Since a very small amount of vapor is needed to form a wet inert gas, the composition of chemical composition will not be significantly affected.
申请公布号 US2002112758(A1) 申请公布日期 2002.08.22
申请号 US20010024087 申请日期 2001.12.17
申请人 AMERICAN AIR LIQUIDE, INC. 发明人 XU MINDI;WANG HWA-CHI;DULPHY HERVE E.
分类号 B24B37/04;B24B57/02;C12N15/12;F04F1/06;H01L21/304;(IPC1-7):F04F1/00 主分类号 B24B37/04
代理机构 代理人
主权项
地址