发明名称 |
Micromechanical component |
摘要 |
A micromechanical component is described, in particular an acceleration sensor or a rotational speed sensor having a seismic mass device which is flexibly mounted using at least one double U spring and can be deflected in at least one direction by an external acceleration. At least one nap stop is provided to limit the deflection of the double U spring.
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申请公布号 |
US2002112538(A1) |
申请公布日期 |
2002.08.22 |
申请号 |
US20010045691 |
申请日期 |
2001.10.19 |
申请人 |
PINTER STEFAN;FISCHER FRANK;RUMP ARNOLD |
发明人 |
PINTER STEFAN;FISCHER FRANK;RUMP ARNOLD |
分类号 |
B81B3/00;G01C19/56;G01P15/125;H01L29/84;(IPC1-7):G01P15/14 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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