发明名称 Micromechanical component
摘要 A micromechanical component is described, in particular an acceleration sensor or a rotational speed sensor having a seismic mass device which is flexibly mounted using at least one double U spring and can be deflected in at least one direction by an external acceleration. At least one nap stop is provided to limit the deflection of the double U spring.
申请公布号 US2002112538(A1) 申请公布日期 2002.08.22
申请号 US20010045691 申请日期 2001.10.19
申请人 PINTER STEFAN;FISCHER FRANK;RUMP ARNOLD 发明人 PINTER STEFAN;FISCHER FRANK;RUMP ARNOLD
分类号 B81B3/00;G01C19/56;G01P15/125;H01L29/84;(IPC1-7):G01P15/14 主分类号 B81B3/00
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