| 摘要 |
<p>A pressurizer for fixed-point processing high in processing accuracy, large in pressuring force, and small in driving energy, comprising a substrate, a supporting plate installed apart a specified distance from the substrate, first and second sliders formed between the substrate and the supporting plate in the direction perpendicular to the substrate and the supporting plate so as to be allowed to be moved in that direction relative to each other, a position detector detecting the moved position of the second slider, a first drive means driving the first slider, a second drive means driving the second slider, and a central processing device controlling the first and second drive means and receiving and processing the position signals from the position detector.</p> |
