Hydrogen sensor comprises gas-sensitive layer with measuring structure applied to it, silicon dioxide filtering layer covering gas-sensitive layer and heating structure

摘要

Hydrogen sensor comprises a gas-sensitive layer having a measuring structure applied to it; a silicon dioxide filtering layer covering the gas-sensitive layer; and a heating structure. The surface of the sensor including all contacting points is covered with a protective layer made from a material which reduces splitting of hydrocarbons at the operating temperature of the sensor. An independent claim is also included for a process for the production of a silicon dioxide protective layer on the hydrogen sensor by depositing silicon dioxide as reaction product from a silicon-containing gas onto the surface of the sensor using a CVD method.