APPARATUS FOR SUPPLYING CHEMICALS FOR FABRICATING SEMICONDUCTOR

摘要

PURPOSE: An apparatus for supplying chemicals for fabricating a semiconductor is provided to precisely detect the quantity of the residual chemicals even if the dielectric constant of the chemicals change. CONSTITUTION: A store tank(201) stores the chemicals(211). A buoyancy pendulum(213) is disposed inside the store tank. The average density of the buoyancy pendulum is the same as or smaller than that of the chemicals. A load cell(217) outputs an electrical signal according to the weight of the buoyancy pendulum. The upper portion of the buoyancy pendulum is suspended from the load cell by a connection string(215). A signal processing apparatus(221) processes the output signal of the load cell and calculates the flow rate of the chemicals.