Optischer Halbleitermodulator und sein Herstellunsgverfahren

摘要

Disclosed is an electroabsorption-type optical modulator, which has: a semiconductor substrate; and a semiconductor buffer layer, a semiconductor optical absorption layer and a semiconductor cladding layer which are layered in this order on the semiconductor substrate; wherein the absorption of a light wave supplied to an end of the semiconductor optical absorption layer is controlled by changing an intensity of electric field applied to the semiconductor optical absorption layer; and the semiconductor optical absorption layer has a region with absorption-edge wavelength shorter than that of the other region of the semiconductor optical absorption layer and a voltage corresponding an external electrical signal is simultaneously applied to both the regions of the semiconductor optical absorption layer, so that, to an incident light, a refractive index of the semiconductor optical absorption layer is decreased and an absorption coefficient of the semiconductor optical absorption layer is increased when an intensity of electric field applied to the semiconductor optical absorption layer corresponding to the external electrical signal is increased.