Method for forming a dielectric layer of a semiconductor device and a capacitor using the same

摘要

A method for forming a dielectric layer of a semiconductor device is disclosed. A semiconductor wafer is loaded into a reaction chamber. A source gas mixture containing at least two mixed chemical reactants is introduced into the reaction chamber, thereby chemically adsorbing a portion of the source gas mixture onto a surface of the semiconductor wafer. The chamber is purged or pumped to remove physisorbed reactants therefrom. The source gas mixture chemically adsorbed on the surface of the semiconductor wafer is oxidized to form an atomic layer.