| 摘要 |
<p>Disclosed are an anisotropic conductive connector which can be easily aligned, held and fixed with respect to a wafer to be tested, even if the wafer has a large area and even if electrodes to be tested are arranged at small pitches and in which a satisfactory conductivity can be acquired for all conductive portions, and insulation from the adjoining conductive portions is set up; a method for manufacturing the connector; and a probe member. This anisotropic conductive connector comprises a frame plate having a plurality of holes for disposing anisotropic conductive films so formed as to correspond to the electrode regions of the wafer to be tested and a plurality of elastic anisotropic conductive films arranged in the respective anisotropic conductive film arranging holes and supported by the peripheral portions of the holes. Each of the elastic anisotropic conductive films includes a functional part having a plurality of conductive portions so arranged to correspond to the electrodes to be tested, extending in the direction of the thickness, and containing conductive particles exhibiting magnetism, and an insulating portion for insulating the conductive portions from one another and a supported part formed integrally with the periphery of the functional part and fixed to the peripheral portions of the anisotropic conductive film arranging holes . The supported portion contains conductive particles exhibiting the magnetism.</p> |
