| 摘要 |
<p>A user interface of a semiconductor evaluator for evaluating the characteristics of a semiconductor device on a wafer. This user interface comprises a means of displaying a setting window for setting a measurement condition of each of setting objects having a hierarchical relationship, a means of displaying a main setting window for managing the setting window, a means of storing the measurement condition set in the setting window in a file, and a means of allowing a second setting window for a second setting object positioned in a layer higher than that of the first setting object to read the measurement condition set in the first setting window for the first setting object and stored in the file. The second setting window enables a user to selectively set the read measurement condition. Thus, the user systematically sets a measurement condition necessary to evaluate the characteristics of a semiconductor device.</p> |
