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发明名称
PRODUCTION METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5216167(A)
申请公布日期
1977.02.07
申请号
JP19750091901
申请日期
1975.07.30
申请人
HITACHI LTD
发明人
SATOU TAKEO;ITOU OSAMU;ARAI YUUJI
分类号
H01L23/50;H01L21/58
主分类号
H01L23/50
代理机构
代理人
主权项
地址
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