HANDLER BLADE OF ROBOT FOR TRANSFERRING WAFER

摘要

PURPOSE: A handler blade of a robot is provided to prevent a wafer drop or a broken wafer by normally correcting a deviated wafer mounted on the handler blade through a sliding along a slant surface. CONSTITUTION: A handler blade(30) of a robot comprises a fixing part(24) and a wafer mounting part(20) for mounting a wafer(22). At this point, the fixing part(24) has a slant surface having a defined slope at the connection portion between the fixing part(24) and the wafer mounting part(20). At this point, the slant surface of the fixing part(24) corrects a deviated wafer so as to stably mount at the wafer mounting part(20) through a sliding along the slope of the surface, thereby restraining a wafer drop or a broken wafer.