WAFER RING HANDLER HAVING DOUBLE BUFFER REGION

摘要

PURPOSE: A wafer ring handler having double buffer regions is provided to efficiently load and unload a wafer from a cassette elevating apparatus to a wafer ring table by improving a structure. CONSTITUTION: A wafer ring handler having double buffer regions comprises a pick-up part(11) for moving wafers(1), a right and left moving part(20) for moving the pick-up part(11) and a guide rail. The pick-up part(11) further includes a cylinder(13) installed one end of a transfer plate(12) for picking-up wafers(1) and a guide block(15) and a transfer block(14) for fixing a belt(23) installed the other end of the transfer plate(12). The guide rail as a double structure further includes an upper rail(31), a lower rail(32) and a driving part(33) for moving the guide rail up and down.