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发明名称
Laser machining of semiconductor materials
摘要
申请公布号
IE20010944(A1)
申请公布日期
2002.08.21
申请号
IE20010000944
申请日期
2001.10.26
申请人
XSIL TECHNOLOGY LIMITED
发明人
ADRIAN BOYLE
分类号
B23K26/06;B23K26/36;H01L21/78;(IPC1-7):B23K26/36
主分类号
B23K26/06
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代理人
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