发明名称 APPARATUS FOR DETERMINING PRECISION POSITION
摘要 PURPOSE: An apparatus for determining a precision position is provided to accurately and quickly work in a bonding operation by keeping a rising curve having a gentle slope through an improvement of a structure. CONSTITUTION: The apparatus comprises a base plate(30), a driving part(31), a transfer plate(32), and a cam part(33). The base plate(30) includes a motor plate(35) and an ending plate(36) formed on both ends of the base plate, and a vertical plate. The driving part(31) further includes a driving motor(42) mounted on the outer portion of the motor plate(35) and a screw(43) connected with the ending plate(36) and the motor axis of the driving motor(42). The transfer plate(32) has a unit plate(46) connected with a nut unit(45) and the base plate(30), and a linear guide. The cam part(33) is composed of a cam plate(51) connected with the transfer plate(32), a lower bearing(58) and an upper bearing(59).
申请公布号 KR20020066795(A) 申请公布日期 2002.08.21
申请号 KR20010007161 申请日期 2001.02.13
申请人 DNC ENGINEERING CO., LTD. 发明人 CHOI, YANG HWAN
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
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