发明名称 |
Surface acoustic wave device |
摘要 |
The surface acoustic wave device includes a piezoelectric substrate having formed on a surface thereof an interdigital transducer for exciting a surface acoustic wave, a cavity formed on a back surface of the piezoelectric substrate on a region corresponding to the region where the interdigital transducer is formed, and a low expansion material buried in the cavity.
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申请公布号 |
US6437479(B1) |
申请公布日期 |
2002.08.20 |
申请号 |
US20010994754 |
申请日期 |
2001.11.28 |
申请人 |
FUJITSU LIMITED;FUJITSU MEDIA DEVICES LIMITED |
发明人 |
MIURA MICHIO;MATSUDA TAKASHI;IKATA OSAMU |
分类号 |
H03H9/25;H03H3/10;H03H9/02;H03H9/145;(IPC1-7):H03H9/25 |
主分类号 |
H03H9/25 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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