发明名称 |
Device, in particular a work table for a projector |
摘要 |
A high-precision device for providing positioning, registration and displacement includes a two-dimensional table for providing positioning and displacement, and a registration unit for bringing markers into registration with one another. The registration unit is attached to a carriage of the table via flexible articulated supports and can be moved by several, preferably seven, drives. The device can be used as a work table for reduction projectors and scanning electron microscopes, for example for investigating structural properties of materials.
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申请公布号 |
US6434840(B1) |
申请公布日期 |
2002.08.20 |
申请号 |
US20000559516 |
申请日期 |
2000.04.27 |
申请人 |
JOURTCHENKO JURI F.;BELYAKOV VLADIMIR K. |
发明人 |
JOURTCHENKO JURI F.;BELYAKOV VLADIMIR K. |
分类号 |
B23Q1/54;B23Q1/62;B23Q5/28;G12B5/00;(IPC1-7):G01B5/00;B23Q3/00 |
主分类号 |
B23Q1/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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