| 发明名称 |
Equipment evaluation and design |
| 摘要 |
A semiconductor processing tool evaluation and design method which replaces tool specifications with a requirements region plus associated evaluation functions for iterative feedback tool design.
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| 申请公布号 |
US6438439(B1) |
申请公布日期 |
2002.08.20 |
| 申请号 |
US19980157129 |
申请日期 |
1998.09.18 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
BARNA GABRIEL G.;DAVIS JOSEPH C.;MOZUMDER PURNENDU K.;BURCH RICHARD G. |
| 分类号 |
H01L21/66;(IPC1-7):G06F19/00 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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