,申请号JP20000574184-传众专利搜索

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发明名称
摘要
申请公布号	JP2002526943(A)	申请公布日期	2002.08.20
申请号	JP20000574184	申请日期	1999.09.16
申请人		发明人
分类号	B24B37/00;C09G1/00;C09K13/00;H01L21/304;H01L21/321;(IPC1-7):H01L21/304	主分类号	B24B37/00
代理机构		代理人
主权项
地址

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