| 摘要 |
In a turbo-molecular pump, a rotor is supported by a magnetic bearing (3) in a non-contact mode. A pump control section (2) has a magnetic bearing control device (8) with a digital signal operating processor or DSP (7) which is programmable by a software or which can execute a programmed software. The digital signal operating processor (7) performs the control of a heating system, namely, a heater, as well as the control of the magnetic bearing (3). |
