SYSTEM AND METHOD FOR CONTROLLING EXHAUST QUANTITY OF SPIN COATING EQUIPMENT

摘要

PURPOSE: A system for controlling an exhaust quantity of spin coating equipment is provided to effectively reduce a particle contamination problem of a resist applying apparatus by optimizing the exhaust quantity according to each process state of the resist applying apparatus. CONSTITUTION: An exhaust system controls the exhaust quantity by using an automatic damper in the spin coating equipment. A stepping motor(10) is installed in the automatic damper to arbitrarily control the angle of a gas intercepting plate of the damper by using the stepping motor so that a proper exhaust quantity is controlled according to each process state. A controller is installed in a side of the stepping motor to automatically control the stepping motor.