| 摘要 |
An improved method for forming shallow trench isolation structures having reduced stress and allowing for greater control over shape, size and characteristics of the shallow trench isolation structures is disclosed. The isolation trench is defined by implanting a substrate through a patterned mask to create heavily doped regions. These heavily doped regions are anodized to form porous silicon and then oxidized. The oxidized porous silicon is removed, leaving behind a trench having rounded corners which is filled with an isolation dielectric.
|
