| 摘要 |
The present invention discloses an alignment apparatus, including: a table; a plurality of guide pins positioned on a peripheral protion of the table; a determined area defined by the guide pins in the table; a plurality of lift pins positioned in the table and moving from the table to the height of over the guide pins; a plurality of proximity pins located on the table to hold the substrate when the lift pins are descended; a cylinder positioned under the table aid driving a plurality of movable arms in a transverse direction; and a plurality of alignment pins extended from the movable arms in a longitudinal direction.
|
