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发明名称
摘要
申请公布号
JP3315213(B2)
申请公布日期
2002.08.19
申请号
JP19930234367
申请日期
1993.09.21
申请人
发明人
分类号
H01L27/14;H01L31/08;H01L51/10;H01L51/42;(IPC1-7):H01L27/14
主分类号
H01L27/14
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