发明名称 METHOD AND SYSTEM FOR MOUNTING GRANULAR MATERIAL
摘要 <p>PROBLEM TO BE SOLVED: To automate feeding, mounting, recovering and refeeding operations of fine granular material. SOLUTION: A counterpart member 13 for mounting granular material is placed on a base plate 11 and a mask 14 is placed on the upper side thereof. The mask 14 is a plate-like electrostatic linear motor for mounting granular material 15 on the counterpart member 13 through positioning holes 17 while transporting the granular material 15 on the mask 14 with an electrostatic force being advanced by a moving electric field. On the upper side of the mask 14, a mechanism 31 for recovering granular material 15a not dropped into the positioning holes 17 and circulating it to the feeding side is provided. The granular material circulation mechanism 31 comprises a section 32 for recovering the granular material 15, a tubular electrostatic linear motor 33 for feeding the recovered granular material 15 back to the feeding side with an electrostatic force being advanced by a moving electric field, and a section 34 for feeding the granular material 15 onto the mask 14 disposed continuously.</p>
申请公布号 JP2002231746(A) 申请公布日期 2002.08.16
申请号 JP20010027528 申请日期 2001.02.02
申请人 TAMURA SEISAKUSHO CO LTD 发明人 MASUDA TSUGUNORI;ONOZAKI JUNICHI
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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