ELECTRODE MATERIAL FOR FORMING STAMPER AND THIN FILM FOR FORMING STAMPER

摘要

PROBLEM TO BE SOLVED: To provide an electrode material for forming a stamper constituted to suppress the damage of a thin film for forming the stamper and to enhance the quality of the stamper to be formed by improving corrosion resistance and the thin film for forming the stamper. SOLUTION: The electrode material for forming the stamper contains silver (Ag) as an essential component and contains at least one kind of other elements. The other elements are preferably at least one kind of either of gold (Au) and cooper (Cu). Further, <=5.0 wt.% both of Au and Cu elements of these elements are more preferably incorporated therein. The thin film for forming the stamper is composed of the electrode material for forming the stamper.