| 摘要 |
PROBLEM TO BE SOLVED: To increase the speed of a measuring process and make measurements with high accuracy. SOLUTION: When a gray-scale image of the subject of measurement is input, a control part 8 extracts angled data (edge code) showing the direction of a optical density gradient on the image and then calculates nonconformity in pixel units in each scanning position and totalizes the nonconformities while scanning a mask of the same size as a model image over an image of the result of processing which indicates the result of the extraction. If a nonconformity exceeding a predetermined threshold is obtained in this totalizing process, the totalizing process is ended; at the scanning position where the totalizing process has ended, the threshold is renewed using the nonconformity if the nonconformity is below the threshold. At the end of the scans, the control part 8 specifies the scanning position, where the nonconformity matching the threshold at that time is obtained, as the position of a contour pattern resembling the model image.
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