| 摘要 |
<p>PROBLEM TO BE SOLVED: To certainly transfer a semiconductor substrate such as a glass substrate or the like without having position difference and a drop in loading and unloading the semiconductor substrate from a stored cassette to various processing steps. SOLUTION: The cassette for storing the semiconductor substrate is made a method of storing in a vertical state in order to restrain deflection due to the self weight of the substrate to a minimum, and the upper part of the substrate stored in a vertical state is clamped with a clamp unit 1 installed in a slide part 2, and after having drawn the substrate from the cassette by raising the slide part using a drive mechanism after clamping, by clamping the substrate with an actuator arranged on a slide guide 4, three sides of the upper part and both side parts of the substrate are clamped and thus stable transfer is performed.</p> |
