| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact spindle moving mechanism of a dicing apparatus having a simple structure. SOLUTION: The spindle moving mechanism of the dicing apparatus comprises guide rails 90, 92 for movably guiding two carriages 72, 74 for mounting spindles 64, 66 in Y-axis direction, and a linear motor 76 for moving the carriages 72, 74 in the Y-axis direction as main constituents. The motor 76 has a magnet rail 78, and two magnet blocks 80, 82; the rail 78 is fixed to a support plate 84; the block 80 is fixed to the carriage 72; and the block 82 is fixed to the carriage 74, When the motor 76 is driven, the carriages 72, 74 are moved along common guide rails 90, 92 in the Y-axis direction. |
