摘要 |
PROBLEM TO BE SOLVED: To provide a support base for a semiconductor crystal ingot, having all various physical properties such as strength, rigidity, heat resistance, dimensional stability, oil resistance, hardness and the like which are required for the base of the ingot. SOLUTION: The support for a semiconductor crystal ingot of a substantially rectangular plate state is molded of a molding material, obtained by blending a mineral filler and reinforcing fiber with thermosetting resin. A blending amount of a filler of 250 to 450 pts.wt. and a blending amount of the reinforcing fiber of 30 to 100 pts.wt. are blended with the thermosetting resin of 100 pts.wt. By blending a large amount of the filler for improving its heat resistance, dimensional stability, hardness and the like, as well as the fiber is improved in strength and rigidity.
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