发明名称 CMOS CIRCUIT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To enhance the reliability and improve the yield by preventing the electric continuity between a gate electrode.wiring and a thin film semiconductor region (active layer), in a CMOS circuit where n-channel TFTs and p- channel TFTs exist mixedly. SOLUTION: The breakage of the gate insulating film at this section is prevented by putting the vicinity of the end of a crossed film semiconductor region, especially, the region adjacent to the section that the gate electrode crosses in the same conductivity type as an intrinsic semiconductor or a channel formation region. As a result, this section shows N type, and it prevents the two impurity regions from being electrically continuous.
申请公布号 JP2002231964(A) 申请公布日期 2002.08.16
申请号 JP20010381191 申请日期 2001.12.14
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 CHO KOYU;TAKEMURA YASUHIKO
分类号 H01L27/08;H01L21/336;H01L21/8238;H01L27/092;H01L29/786;(IPC1-7):H01L29/786;H01L21/823 主分类号 H01L27/08
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