| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of an integrated thin film solar battery which can prevent electric insulating failures between a first electrode film and a second electrode film. SOLUTION: In a process for manufacturing the integrated thin film solar battery where a plurality of unit cells 5 obtained by sequentially laminating first electrode films 2, semiconductor films 3 and second electrode films 4 on a substrate 1 are connected in series, a laser beam and the thin film solar battery are relatively moved while the thin film solar battery is irradiated with the single pulse high repetitive laser beam. Thus, the laser beam 21 whose pulse width is not more than 20 ns and the edge rise width of intensity distribution is not more than 7μm is used as the laser beam when an open groove for removing the second electrode films 4 and the semiconductor films 3 is disposed.</p> |
