PRODUCTION CONTROL SYSTEM OF SEMICONDUCTOR DEVICE, PRODUCTION CONTROL METHOD OF SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent the diffusion of contaminant caused by a human error, regarding a production control for managing service conditions of a vessel for wafer transfer. SOLUTION: By a cassette usage rule processing function 66, usage rules regarding a vessel for accommodating a wafer are stored. By using a process- flow forming function 72, a process flow for verification is formed. By a process- flow check function 74, it is checked whether the process flow for verification satisfies the usage rules of a cassette. Only a flow satisfying the rules is provided to a manufacturing line. By a processing condition display function 82, the usage rules of the cassette are displayed to a line operator in each process. In the case that a cassette exchange is necessary when the process is started or ended, the exchange is indicated by a process starting function 84 or a process ending function 86.