ELECTROSTATIC CHUCK, DISCHARGE PREVENTING METHOD TO RECESSED PARTS FORMED ON ATTRACTING SURFACE THEREOF, AND SUBSTRATE FIXING, HEATING AND COOLING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic chuck wherein a discharge phenomenon is not generated when heat conducting gas is made to flow in recessed parts formed on an attracting surface for attracting a substrate. SOLUTION: In the electrostatic chuck wherein the recessed parts are formed on the attracting surface for attracting the substrate, conductive films are arranged in the recessed parts. Furthermore, a conductive film is arranged inside a hole which penetrates the electrostatic chuck and interconnects the recessed parts.