| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable an adequate and quick countermeasure action to be taken as if an engineer familiar with equipment is beside the equipment. SOLUTION: In a method for managing the state of a plurality of semiconductor manufacturing equipment from a remote place, data of the equipment during a normal operation are sampled. On the basis of a group of the sampled data, a range of dispersion of data in the equipment is grasped. In the state of a mutual consent, data during a real operation are monitored in a remote managing station via a communication network in a state that an adequate security management (security managing equipment) is performed. In the course of monitoring, a comparison with the data group is performed, and error generation is warned. When the error generation is recognized, the consent of the semiconductor manufacturing equipment manager is obtained (in order to ensure safety by using environment informing equipment). In order to improve the precision of the information, an access is performed via the communication network from the managing station. (By using alarm verification/remote operation equipment), the semiconductor manufacturing equipment is made to directly perform necessary operations, and the data are transmitted to the managing station.</p> |
