LAYOUT VERIFICATION METHOD FOR A PLURALITY OF METAL AND VIA

摘要

PROBLEM TO BE SOLVED: To provide a method for verifying the layout of a plurality of metals and vias capable of realizing layout verification by using simple arithmetic processing. SOLUTION: This method comprises an extraction step (S5) for extracting a pair of vertexes included in the side of a difference between resize quantity with each side of a via is enlarged for a verification value and resize quantity with which each side of the via is enlarged for a difference between the verification value and the verification minimum value, an extraction process (S7) for extracting the pair of sides to be verified by subtracting the pair of vertexes from the side, and an interval measuring process (S8) for measuring an interval between the outside edges of the pair of sides to be verified.