Kombiniertes Nahfeld- und Interatomarkraftrastermikroskop,申请号DE1996619357T-传众专利搜索

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发明名称	Kombiniertes Nahfeld- und Interatomarkraftrastermikroskop
摘要
申请公布号	DE69619357(T2)	申请公布日期	2002.08.14
申请号	DE1996619357T	申请日期	1996.12.13
申请人	SEIKO INSTRUMENTS INC., CHIBA	发明人	MURAMATSU, C/O SEIKO INSTRUMENTS INC.;UMEMOTO, TAKESHI
分类号	G01B11/30;G01B7/34;G01N37/00;G01Q20/04;G01Q30/14;G01Q60/18;G01Q60/24;G01Q60/32;H01J37/28;(IPC1-7):G01B7/34;G02B21/00	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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