Kombinationstechnik für RF-Stromversorgerungsgerät mit erhöhter Stabilität,申请号DE19966016620T-传众专利搜索

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发明名称	Kombinationstechnik für RF-Stromversorgerungsgerät mit erhöhter Stabilität
摘要
申请公布号	DE69616620(T2)	申请公布日期	2002.08.14
申请号	DE19966016620T	申请日期	1996.03.06
申请人	APPLIED MATERIALS, INC.;COMDEL RF POWER SYSTEMS, BEVERLY	发明人	STIMSON, BRADLEY O.;RUMMEL, PAUL W.
分类号	H05H1/46;H03H11/30;H03H11/36;(IPC1-7):H03H11/30	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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